Fabrication technology of microlens array by melting photoresist 微透镜阵列的光刻胶热熔制作技术
Evaluating safelights for photoresists 光刻胶安全灯的评价
X ray resist x 射线光刻胶
Actuality and development of ultra - clean and high pure chemical reagents and photoresists in china 我国超净高纯试剂和光刻胶的现状与发展
By digitization , we optimize the intensity data of the incidence beam at the vicinity of start point and end point . 3 通过选择合适的涂胶参数,在凹透镜表面上进行了薄光刻胶胶层的均匀涂布。
Alignment insures that a new pattern being added to a wafer is aligned to the previous pattern or patterns on the wafer 对准之后,当照射光通过掩模的透明区域时,晶片上对辐射敏感的光刻胶曝光。
With the third harmonic 355nm nd : yag laser as the exposal source , the lithography of su - 8 photoresist is studied 本文采用波长为355nm的三倍频nd : yag激光作为曝光光源,对su - 8光刻胶进行光刻研究。
In microelectronics , the process of removing material , on a chip , left exposed by the exposure and development of the photoresist 在微电子技术中,通过曝光并显影光刻胶除去芯片上的物质露出剩馀部分的工艺。
Lin h , li l and zeng l . , " in - situ end - point detection during ion - beam etching of multilayer dielectric gratings " , chin . opt . lett . , 3 ( 2 ) , 63 ( 2005 ) 林华, "介质膜光栅:光刻胶掩模占宽比和离子束刻蚀槽深的监控" ,博士论文,导师:李立峰( 2006 )
We demonstrate experimentally the technique to fabricate large does in the thick film on a concave lens ( mirrors ) surface with precise alignment by using the strategy of exposure twice 采用两次曝光的方法在凹透镜表面上厚光刻胶中制作衍射光学元件。