The main contents and contributions include : ( 1 ) it has been proposed to uniform the temperature distribution through space modulating the intensity incident on the surface of substrate using a mask the emphasis of this method is to find the laser intensity distribution that can realize the temperature uniformity . the results show that when the mean temperature rise in the processed area is 500 k , the maximum temperature difference is 3 . 5 k , which can meet the accurancy requirement of temperature uniformity 计算结果表明,采用四环带结构的掩膜板对入射光进行调制,在0 . 2倍光斑半径区域内平均温升达到500k时,最大温差只有3 . 5k ( 0 . 4倍半径处仅有4 . 5k左右) ,可以在激光微细加工区域得到比较满意的温度分布。