耐: be able to bear or endure活性: activity; active; activated离子: ion腐蚀性: corrosivity; causticity; acr ...活性离子腐蚀: reactive ion etch活性离子腐蚀系统: reactive ion etch system活性离子束腐蚀: reactive ion beam etch; ribe等离子腐蚀: plasma etching离子腐蚀: ion erosion反应离子腐蚀: reactive ion etching (rie)高频离子腐蚀: high frequency ion etching活性离子束: reactive ion beam等离子腐蚀清洗: plasma etch cleaning等离子腐蚀用掩模: plasma etch mask表面活性离子: surface-active ion活性离子电解仪: active ion electrolyser; active ion electrolysis unit活性离子束氧化: reactive ion beam oxidation磁控管离子腐蚀装置: magnetron ion etcher圆筒形反应期等离子腐蚀: barrel reactor plasma etching管子腐蚀处: pithole兼性离子表面活性剂: zwitterionic surface-active agent经深活性离子蚀刻工序: drie两性离子表面活性剂: bi-ion active agent; zwitterionic surfactant腐蚀性: corrosivity; causticity; acridity兼性离子，两性离子: zwitterion
