光刻术英文_光刻术英语怎么说

光刻术的英文

光刻: photoetching
术: art; skill; technique
显微光刻术: microphotolithography
光刻: [物理学] photoetching◇光刻材料 photoetching material; 光刻工艺 photoetching technology; 光刻技术 photoetching technique; photetch
电刻术: electrography; glyphography

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A lot of micro machining technologies are developed to fabricating memss . recently , lithograph of thick resist has been regarded as an effective and economical technology for manufacturing excellent high - aspect - ratio microstructures ( harms )
近年来，作为制作优质大高宽比微结构的厚层抗蚀剂光刻术以其工艺简单、制作成本低等优点受到国际上广泛重视。
In the past , process controls of thick resist lithograph have been studied extensively . on the contrary , much less investigation has been done concerning its imaging transmission . unfortunately , the existent exposure and development simulation models are only appropriate for thin film resist
但目前关于厚层抗蚀剂光刻方面的研究，主要局限于实验工艺的改进上，对其图形传递机理的研究做得很少，现有的曝光、显影模型均未考虑厚层抗蚀剂光刻成像的一些特殊属性，一定程度上制约了厚胶光刻术的深入发展和应用。

光刻术的英文