Testing of materials for semiconductor technology - determination of impurity content in semiconductors by infrared absorption - part 2 : boron in gallium arsenide 半导体工艺材料试验.通过红外线吸收测定半导体中杂质
Testing of materials for semiconductor technology - determination of the geometric dimensions of semiconductor wafers - part 5 : terms of shape and flatness deviation 半导体技术试验.半导体片几何尺寸测定.第5部分:形状
Testing of materials for semiconductor technology - contactless determination of the electrical sheet resistance of semiconductor layers with the eddy - current method 半导体工艺材料的检验.用涡流法无接点测量半导体层的
Testing of materials for semiconductor technology - methods for the characterisation photoresists - part 2 : determination of photosensitivity of positive photoresists 半导体技术用材料的试验.表征光敏抗蚀剂的方法.第2部
Methods of testing refractory materials - unshaped refractories used in monolithic construction - testing of materials as preformed test pieces 耐火材料试验方法.第7部分:整体结构用未成形耐火材料.第6节:预制试件材料试验