In this thesis , the general error sources for psi are analyzed . we find that the relatively low - frequency vibrations at 50hz and lower are the main problem through the analysis of the vibration sources in usual environment . a new vibration compensation method , phase modulating interference fringes fractionizing technology , has been put forward in a creative way 本文分析了干涉测量技术中存在的主要误差来源,通过对通常环境下振源特性的分析,得到了对干涉测试影响较大的振源的频率范围主要在30hz以下,确定了抗振补偿的目标和技术指标是使干涉仪的振动频率50hz ,振幅1 m 。
The main works and contributions achieved in this dissertation are concluded as follows : 1 . based on the scalar diffraction theory , the mathematical model of optical configuration of transmissive grating interferometer is established . it indicats that moir interference fringes is affected by many parameters , such as grating pitch , light wavelength , light beam size and incidence angle , etc . the variation that the width , intensity , orientation and contrast of moir interference fringes along with every parameter is numerically analyzed 主要的研究内容和所取得的成果可归纳如下: 1 .基于标量衍射理论,建立了透射式光栅干涉仪光路的数学模型,分析了透射式光栅干涉仪的莫尔干涉条纹与光栅栅距、光栅开口比、光波波长、光斑尺寸、光束入射角等多个参数的关系。
It has many unique advantages compared with laser interferometry . and it can achieve higher accuracy and resolution than traditional geometry moir . it has been proved to be very useful in many practical applications , such as microelectronics , ultra - precision manufacturing , bioengineering , medicine , space technology , and material science , etc . in this dissertation , key technologies of nanometer displacement measurement by grating interferometry are systematically investigated , which mainly include measuring theories , designing grating interferometer and new subdividing method for moir interference fringes 作为能够实现纳米级位移测量的技术之一,光栅干涉位移测量技术具有激光干涉仪不具备的独特优点,可以获得比几何莫尔术更高的测量准确度、更高的分辨率,在诸如微电子、超精加工、生物工程、未来医学、航天技术、材料科学等众多领域有广泛的应用前景。
Secondly , in phase unwrapping to overcome the spread of wrong point , changing the patch of unwrapping phase is done to improve the correctness of it . then , the relation between the unwrapping phase and the height of reconstructed object is discussed detailedly . the data processing , algorithm analysis and reconstructing object are done for the collecting fringe image which are all based on matlab language , in all these achievements , the improvement and innovation aspect are following : a ) in order to stabilize the interference fringe , a new equivalent shifting object method is presented by using fringe stabilizing device to stabilize the interference fringe though moving object and ccd camera which fixed on a precise moving platform together , the experimental result shows the fringe drift is less than a / 20 in five minutes , and the equivalent phase shifting precision is x / 100 论文在全面阐述了光学三维轮廓位相测量术的发展、应用现状、研究热点及未来发展趋势的基础上,简要介绍了傅立叶变换和相移位相轮廓测量术的基本原理,对两种测量方法存在的问题及误差进行详细分析和比较;针对位相解包裹错误点的传播问题,作者通过改变解包裹路径来提高位相解包裹的正确性;分析讨论从解包裹位相( x , y )到再现物体的高度h ( x , y )物理量之间的关系,研究相应的算法,利用matlab平台,对实际采集的条纹图像进行处理和轮廓重构,其中改进及创新工作主要表现在以下两个方面: ( a )针对干涉型结构光场干涉条纹出现的漂移抖动对相移的影响,提出了一种用条纹稳定器稳定干涉条纹,用精密移动平台使物体和ccd摄像头同步移动实现等效相移的方法,建立了相应的测量系统,系统的条纹稳定可以达到。
The fourth chapter mainly introduces fringe center method of speckle image . a way which can double interference fringe is introduced here , and it can improve the precision of measurement . the principle of the filter in big curve window is described in detail ; it gives a detail description of its steps to realize it 第四章主要介绍了散斑图像处理的条文中心处理方法? ?条纹倍增的处理方法,它可以使散斑图像的条纹增加一倍,相对提高了测量的精度,随后详细介绍了曲线大窗口滤波的原理以及实现该方法的主要步骤,同时讨论了处理过程中的注意事项,并跟其他滤波方式做了比较。