So the mirror and mechanical part can be fabricated in a one - level mask step by bulk micromachning of ( 100 ) with koh etching . we can on off the light path and switch the light exchange by controlling the movement of mirror 本论文使用传统的koh腐蚀液,利用硅材料的各向异性的特点,加工出了垂直于衬底表面的微镜结构,利用这种微镜结构可以完成光线的切换,实现光路的开关功能。
From the experiments we can get a conclusion that with the characteristics of working well , sample circuit and light path , rated current error and phase error fulfilling accuracy class 0 . 2 , and respond speed and bandwidth superior to old electromagnetic current transducer , the hybrid current transducer we designed is practical 实验证明,采用这种方法设计的混合式光纤电流互感器工作可靠、电路和光路简单,比差和相差都能够很好地满足国标中对0 . 2级电流互感器的要求,动态响应速度、带宽等性能都明显优于传统的电磁式电流互感器,已经进入实用化阶段。
To satisfy the experiment request , the equipment generating magnetic field and the angular instrument are improved . for light wave from semiconductor laser is infrared wave in the experiment , the calibrating measurement utilizing visible light from he - ne laser is used . firstly the light path is adjusted using visible light roughly 在搭建系统时,根据实验要求对磁场仪(小磁场时的稳定性)及摘要第2页测角仪(测量精度)进行了改进;在调整光路时, (又据使用的红外激光光源的特点,采用了先利用he ne激光器的可见光波粗略校准光路,然后换用半导体激光器精确校准光路的方法。
In order to meet the requirements of uncertainty , we need not only know the property of all apparatus but also precisely debug software , tune electric signal and light path to achieve optimal combination in every wavelength . in conclusion , we accomplish the project successfully and realize optimal combination of apparatus through our diligent work 本标准装置的测量不确定度要求高,除了熟悉所有硬件的性能外,还必须对光、机、电、算进行精确调试,实现每个波长下所有硬件的最优组合,来达到理想的测量结果,该项调试工作包含了对软件的调试,电信号的调试,光路调试。
In order to realize the measurement of several parameters and broad - band spectrum ( 250nm ~ 3000nm ) on the same standard equipment , we make use of two main light paths . one is to measure spectral radiance , the other is to measure irradiance through integral sphere , translational stage and mirror changing the light path 本标准装置涉及参数多,包括光谱辐照度、光谱辐亮度、光源色温;光谱范围宽,覆盖了紫外、可见、红外;在同一套设备上实现多参数、宽光谱以及能量强度变化为7个数量级的精确测量。