1 . the principle and method of extracting the optical constants from transmission , reflection , differential , and ellipsometry ttds are reviewed and analyzed systematically . the programs using newton algorithm are developed to solve the equations . the extraction of other material parameters is also discussed in detail 主要有以下方面:一、总结分析了透射型、反射型、差分型、椭偏型thz时域光谱系统提取材料光学常数的原理、方法,利用newton迭代的方法编程解决了实验数据处理方面的一些问题。
The chemical composition , micro - structure and optical properties and its application of tio2 thin films deposited on k9 glass by using reactive electron - beam evaporation ( reb ) are studied through sem , tem , xps , xrd , spectroscopic ellipsometry ( se ) and uv - vis spectrophotometer in the dissertation , and the progresses of nucleation and growth of thin film are discussed from the point of view of dynamics and thermodynamics so that a structure model of tio _ ( 2 ) thin film is brought forward 本文采用sem 、 tem 、 xps 、 xrd 、椭圆偏振仪( se ) 、 uv - vis分光光度计等分析手段系统地研究了电子束反应蒸发方法在k9玻璃上制备tio _ 2薄膜的成分、结构和光学性能以及tio _ 2薄膜在光学多层膜中应用,并开发了膜系设计软件。文中还从动力学和热力学角度分析了tio _ 2超薄膜的形核生长过程,得出了tio _ 2薄膜的组织结构模型。
In this study , on the base of the present status and future development of semiconductor materials for solar cells , we have carried out the work to compose film structures of si - based materials by theoretical analysis and experimental methods , which have potential application in modules of solar cells . the processing , features of microstructure and optical properties of the designed si - based thin films have been studied in detail by employing methods of xrd , sem , afm , tem , raman , ftir , uv - vis , pl , and ellipsometry spectroscopy ( se ) 本文在全面总结目前太阳电池材料的研究现状和其未来发展趋势的基础上,系统地从理论和实验两方面对应用在太阳电池板上的si基薄膜材料的结构进行了设计,用超高真空磁控溅射仪研究了其制备工艺,用了xrd 、 sem 、 afm 、 tem 、 raman 、 ftir 、 uv - vis 、 pl和椭圆偏光仪( se )等分析手段研究了薄膜的相结构、微观组织特征和其所具有的光性能。
Ellipsometry based on polarized transformation , beams of light reflecting and transmitting on the thin films , is the method which inverse ellipsometric parameters processed by computers to obtain various of optic parameters of measured thin films . although a few researchers have discussed ellipsometric parameters of gratings on theory and experiment 椭偏测量技术是利用光束在薄膜上反射和透射时出现的偏振变化,通过椭偏仪测量其椭偏参数的变化,用计算机处理由测量得到的椭偏参数从而反演得到待测薄膜的各种光学参数。
Ellipsometry is an optical technique for the investigation of the dielectric properties (complex refractive index or dielectric function) of thin films.